ConductiveCoating
是涂导电涂料那一步吧,下面是英文的Wiki百科.找的好苦啊.
ConductiveCoating–Anultrathincoatingofelectrically-conductingmaterial,depositedeitherbyhighvacuumevaporationorbylowvacuumsputtercoatingofthesample.Thisisdonetopreventtheaccumulationofstaticelectricfieldsatthespecimenduetotheelectronirradiationrequiredduringimaging.Suchcoatingsincludegold,gold/palladium,platinum,tungsten,graphiteetc.andareespeciallyimportantforthestudyofspecimenswiththescanningelectronmicroscope.Anotherreasonforcoating,evenwhenthereismorethanenoughconductivity,istoimprovecontrast,asituationmorecommonwiththeoperationofaFESEM(fieldemissionSEM).Whenanosmiumcoaterisused,alayerfarthinnerthanwouldbepossiblewithanyofthepreviouslymentionedsputteredcoatingsispossible.[12]